IMPROVED PROCESS FOR PRODUCING A DEVICE COMPRISING CAVITIES FORMED BETWEEN A SUSPENDED ELEMENT RESTING ON INSULATING PADS SEMI-BURIED IN A SUBSTRATE AND THIS SUBSTRATE

摘要

A method for producing a device including plural cavities defined between a substrate in at least one given semiconductor material and a membrane resting on a top of insulating posts projecting from the substrate, the method allowing a height of the cavity or cavities to be adapted independently of a height of the insulating posts and allowing cavities of different heights to be formed.