| 摘要 |
PROBLEM TO BE SOLVED: To stably carrying a vessel, without damaging the vessel, when carrying the vessel by a gas jet. SOLUTION: This carrying device 30 is for carrying the vessel 90 by the gas jet, and has a side guide rail extending on the side of the carrying vessel 90 along a carrying passage of the vessel 90, and a horizontal directional position adjusting means 52 for steplessly adjusting a position along the horizontal direction of the side guide rail. The horizontal directional position adjusting means 52 has a motor for driving the side guide rail in the horizontal direction. COPYRIGHT: (C)2010,JPO&INPIT |
