,申请号JP20090264086-传众专利搜索

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发明名称
摘要	A sputtering target including an oxide sintered body including In, Zn and Ga, wherein a surface compound and an interior compound are essentially of the same crystal type(s).
申请公布号	JP5591523(B2)	申请公布日期	2014.09.17
申请号	JP20090264086	申请日期	2009.11.19
申请人		发明人
分类号	C23C14/34;C04B35/00;H01L21/363	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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