| 摘要 |
PROBLEM TO BE SOLVED: To eliminate cleaning irregularity of a part corresponding to a shade of a holding part viewed from an oscillator in a cleaning object, in an ultrasonic cleaning device for storing the cleaning object in a cleaning treatment tank with a cleaning liquid stored therein to be treated.SOLUTION: When it is assumed that the length of a short side in a principal surface of an oscillator 121, the width of a holding part 142a, ultrasonic wavelength in a cleaning liquid L, the distance from the principal surface of the oscillator 121 to the holding part 142a and the distance from the principal surface of the oscillator 121 to a point of a cleaning object W closest to a liquid surface are 2a, 2w, λ, zand z, respectively, at least one of the dimension of the oscillator 121, the oscillation frequency of an oscillator 110, the dimension of the holding part 142a and the position of the holding part 142a is adjusted to satisfy (w/z)≤tan{arcsin(1.39λ/2&pgr;a)} and z≤2.9×(a/λ). |
