发明名称
摘要 A laser mask is disclosed. In one embodiment, the laser mask includes: a mask substrate including i) at least one light transmission portion configured to transmit light therethrough and ii) a plurality of light interruption portions separated by the light transmission portion interposed therebetween. The light interruption portions are configured to block light; and a plurality of protrusion and depression regions positioned on the light interruption portions of the mask substrate. The protrusion and depression regions comprise a plurality of concave portions and a plurality of convex portions which are alternately formed.
申请公布号 JP5593182(B2) 申请公布日期 2014.09.17
申请号 JP20100214219 申请日期 2010.09.24
申请人 发明人
分类号 H01L21/20 主分类号 H01L21/20
代理机构 代理人
主权项
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