| 摘要 |
A high pressure, miniature pressure sensor has a cup-shaped housing having an open end closed by a metal substrate. A raised stress isolation pedestal portion is formed on the substrate that receives a stress isolation glass pedestal element and in turn a silicon pressure sense element, all having closely matched CTEs to minimize temperature induced stresses. A fluid passageway is formed through the substrate and glass pedestal and an O-ring is placed around the passageway on the lower side of the substrate. A flexible circuit having a slit tail formed with two lobes for receipt respectively in the housing and on the substrate allows easy access of a solder iron during assembly. Mounting flanges extend from the substrate to facilitate mounting of sensor and minimize transfer of mounting stresses to the sense element. |
