| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device and inspection method of a flexure substrate for a suspension, and a manufacturing method of a flexure substrate for the suspension that can improve productivity by suppressing positional deviation of an inspection probe to avoid damage to an inspection object even in the case where the amount of heat from the inspection probe and the inspection object increase due to minute and high-density wiring or the increase in the number of inspection. SOLUTION: An inspection device of a flexure substrate for a suspension measures temperature around an inspection tool. When the measured temperature exceeds a predetermined upper limit temperature, the inspection device provides cool air to the periphery of the inspection tool until the temperature decreases to a predetermined lower limit temperature or below so that the temperature around the inspection tool is in the controlled state of desired temperature range. The problem is solved by performing a conduction inspection under such condition. COPYRIGHT: (C)2012,JPO&INPIT |
