摘要 |
Disclosed is a vaporizer with a plurality of heat exchangers. The vaporizer comprises a cylindrical chamber (10), wherein the cylindrical chamber (10) includes a first path (12) and a second path (14) providing a path to allow liquid chemical and carrier gas to flow, a plurality of heat exchangers (11, 13, 15, 17) and a rod heater inserted to the second path (14). |