发明名称 VAPORIZER
摘要 Disclosed is a vaporizer with a plurality of heat exchangers. The vaporizer comprises a cylindrical chamber (10), wherein the cylindrical chamber (10) includes a first path (12) and a second path (14) providing a path to allow liquid chemical and carrier gas to flow, a plurality of heat exchangers (11, 13, 15, 17) and a rod heater inserted to the second path (14).
申请公布号 KR20140110116(A) 申请公布日期 2014.09.17
申请号 KR20130021007 申请日期 2013.02.27
申请人 G O ELEMENT CO., LTD. 发明人 KIM, DAE HYUN;LEE, YOUNG JONG
分类号 C23C16/448;H01L21/31 主分类号 C23C16/448
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