| 发明名称 |
TRIHALOSILANE REFINING DEVICE |
| 摘要 |
<p>A trihalosilane refining device and a trihalosilane refining method are provided. The trihalosilane refining device can be useful in obtaining high-purity trihalosilane from a feed containing a trihalosilane while consuming a small amount of energy.</p> |
| 申请公布号 |
EP2778133(A1) |
申请公布日期 |
2014.09.17 |
| 申请号 |
EP20120848077 |
申请日期 |
2012.11.12 |
| 申请人 |
LG CHEM, LTD. |
发明人 |
LEE, SUNG KYU;SHIN, JOON HO;LEE, JONG KU;KIM, SUNG KYUN |
| 分类号 |
C01B33/107;B01D3/14;B01D3/42;C01B33/037 |
主分类号 |
C01B33/107 |
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