PRE SPACE TRANSFORMER AND SPACE TRANSFORMER MANUFACTURED BY THE PRE SPACE TRANSFORMER, AND APPARATUS FOR INSPECTING SEMICONDUCTOR DEVICE WITH THE SPACE TRANSFORMER

摘要

Disclosed herein is a pre space transformer including: a substrate having a first surface and a second surface, which is an opposite surface to the first surface; individual electrodes disposed on the first surface; and common electrodes disposed in the substrate, wherein the individual electrodes are repeatedly disposed while configuring a unit pattern.