| 摘要 |
A cold trap includes two individually controllable cooling units. The cold trap is provided in an evacuation path for connecting a vacuum chamber to a turbomolecular pump, The first cooling unit includes a first panel unit provided in the evacuation path such that the panel is exposed, and a first refrigerator thermally coupled to the first panel unit so as to cool the first panel unit. The second cooling unit includes a second panel unit provided in the evacuation path such that the panel is exposed, and a second refrigerator thermally coupled to the second panel unit so as to cool the second panel unit. The first panel unit is spaced apart from the second panel unit. |
