PROBING METHOD, PROBE CARD FOR PERFORMING THE METHOD, AND PROBING APPARATUS INCLUDING THE PROBE CARD

摘要

According to a probing method, set is an allowable temperature range which secures the contact between the needle of a probe card and a pad of an actual substrate having a test temperature. The allowable temperature range is provided to the probe card. The needle is in contact with the pad. A test current is provided to the pad through the needle, thereby testing the actual substrate. Therefore, the time for providing a test temperature environment to the probe card can be reduced, by heating or cooling a multilayer substrate only until the allowable temperature range which secures the contact between the pad of the substrate and the needle of the probe card, without heating and cooling a multilayer substrate to the test temperature.