Method and system for synchronously suppressing subcritical vibration of magnetic suspension molecular pump rotor

摘要

A method for synchronously suppressing the subcritical vibration of a magnetic suspension molecular pump rotor. The amplitude, frequency and phase of rotor subcritical vibration is obtained by synchronously sampling a rotor subcritical vibration signal generated after a magnetic suspension molecular pump rotor falls off, and a compensation force is output based on this to suppress the rotor subcritical vibration. The method realizes accurate synchronization of subcritical vibration signals, and can rapidly realize suppression of rotor subcritical vibration.