发明名称 IONIZATION MANOMETER
摘要 The invention relates to a measurement device (1, 22, 25) for measuring the residual gas pressure in a vacuum. The measurement device (1, 22, 25) has an electron gun (2) and a gauge head (3, 27). The electron gun (2) and gauge head (3, 27) are designed and arranged separately from each other.
申请公布号 EP2776805(A1) 申请公布日期 2014.09.17
申请号 EP20120778084 申请日期 2012.10.17
申请人 GSI HELMHOLTZZENTRUM FÜR SCHWERIONENFORSCHUNG GMBH 发明人 KOLLMUS, HOLGER;WILFERT, STEFAN
分类号 G01L21/30 主分类号 G01L21/30
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