LASER PROCESSING WITH MULTIPLE BEAMS AND RESPECTIVE SUITABLE LASER OPTICS HEAD

摘要

The invention relates to a laser optics head (10) configured for use in a laser scribing device, comprising a diffractive optical element (11), a focusing objective (13) and an adjusting means (21), whereby the diffractive optical element (11) and the focusing objective (13) are arranged spaced apart from each other on one common optical axis (16), and the adjusting means (21) is configured for rotating the diffractive optical element (11) in a third plane orthogonal to the optical axis (16). The invention provides for a reduction in leakage current of thin film solar cells.