DEVICE AND METHOD FOR PLASMA STERILIZATION

摘要

An apparatus for sterilization according to an embodiment of the present invention comprises: a chamber containing objects of sterilization; a vaporizer heating air; a vacuum unit discharging water and cold air from the chamber; an air supply unit injecting the heated air into the chamber; and a control unit controlling the air supply unit to allow the air heated in the vaporizer to be injected into the chamber, controlling the vacuum unit to discharge air therefrom until the air pressure in the chamber becomes a first preset air pressure, and controlling the air supply unit to inject the heated air into the chamber until air pressure in the chamber becomes a second preset air pressure.