| 摘要 |
The present invention provides a hopper capable of supplying a material having microparticles. The hopper includes: a container that contains the material that is powder of which a particle has a diameter of 0.1-10μm; a pressure controlling part which periodically generates pressure variance in the inside of the container; and a shaker which vibrates the container. The hopper: supplies the material in the container from a hole, formed on the container, by the periodic pressure variance and vibrations; and transfers the material by using carrier gas. |
