Microelectromechanical gyroscopes and related apparatus and methods

摘要

In one embodiment, an apparatus includes a resonant structure having a plate, a drive electrode and a sense electrode. The resonant structure defines an axis substantially orthogonal to a plane defined by the plate when the resonant structure is not excited. The plate is formed from a piezoelectric material. The drive electrode is configured to excite the resonant structure, and the sense electrode is configured to sense a signal in response to rotation of the resonant structure about the axis.

主权项

1. An apparatus, comprising:
a resonant structure having a plate, a drive electrode and a sense electrode, a temperature compensated stack, and a substrate, the resonant structure defining an axis substantially orthogonal to a plane defined by the plate when the resonant structure is not excited, the plate formed from a piezoelectric material, the drive electrode for applying a voltage to the resonant structure to excite the resonant structure, the sense electrode for supplying a signal generated by the resonant structure in response to rotation of the resonant structure about the axis; the temperature compensated stack located between the plate and the substrate; and the resonant structure being suspended and coupled to the substrate by a plurality of anchors.