发明名称 A METHOD OF FORMING A METAL ELECTRODE OF A SOLAR CELL WIRING
摘要 <p>The present invention relates to a method for forming a metal electrode wiring of a solar cell through a selective deposition process. The method for forming a metal electrode wiring in a solar cell element comprises the steps of: forming an emitter diffusion region formed on the upper surface of a silicon substrate; forming a base diffusion region formed on the lower surface of the substrate; forming a transparent electrode layer by TCO-based indium tin oxide (ITO) to a transparent electrode layer deposited on the emitter diffusion region and the base diffusion region; forming a seed layer for selective electrode seed formation on the transparent electrode layer formed by the ITO forming step; forming a copper (Cu) metal electrode on the surface in which the seed layer is formed; and forming a cap layer on the metal electrode surface.</p>
申请公布号 KR20140109536(A) 申请公布日期 2014.09.16
申请号 KR20130022049 申请日期 2013.02.28
申请人 AMSI;KIM, SOO WON 发明人 KIM, SOO WON
分类号 H01L31/042;H01L31/0224;H01L31/18 主分类号 H01L31/042
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