Method for fabricating a circuit

摘要

A method for fabricating a circuit, by defining a first set of resist features on a substrate and corresponding to a first mask layout, followed by defining a second set of resist features on the substrate corresponding to a second mask layout, wherein the second set adds to the first set for rectifying an error in either mask layout. In another aspect, the method is by defining a first set of resist features on a substrate and corresponding to a first mask layout that has an error, etching the substrate while the first set protects selected regions, defining a second set of resist features on the substrate and corresponding to a second mask layout, followed by etching the substrate to selectively remove portions of the selected regions for rectifying the error.

主权项

1. A method for fabricating a circuit, said method comprising:
forming a first at least one resist feature on a processed layer, wherein said first at least one resist feature corresponds to a first mask layout, and wherein said first mask layout has an error; etching at a first time said processed layer while said first at least one resist feature protects a first at least one selected region of said processed layer; stripping said first at least one resist feature; forming a second at least one resist feature on said processed layer, wherein said second at least one resist feature corresponds to a second mask layout; etching at a second time said processed layer while said second at least one resist feature protects a second at least one selected region of said processed layer, wherein said etching at a second time selectively removes a portion of said first selected region of said processed layer and forms a void therein for rectifying said error; and at least partially filling said void with a dielectric material.