Row bar ring-to-ring transfer using single-sided adhesive film and vacuum

摘要

Row bars are attached to a lapping ring by a first single-sided adhesive film that adheres to the row bars and are secured to a first lapping ring by a vacuum. After backside lapping is performed on the row bars, the row bars are transferred to a second lapping ring with second single-sided adhesive film by compressing the row bars between the adhesive films and deactivating the vacuum, thereby releasing the row bars from the first lapping ring and providing ring-to-ring transfer without peeling the row bars off the first single-sided adhesive film. Lapping rings used for this process include vacuum channels and slots for holding the row bars so that the top surfaces of the row bars and lapping ring are substantially flat. Ring-to-ring transfer tools are used to transfer row bars between the backside lapping ring and the frontside lapping ring with minimal handling of the row bars.

主权项

1. A method comprising:
providing a row bar with a first side of the row bar adhered to a first single-sided adhesive film; mounting the row bar on a first lapping ring by applying a first vacuum to a non-adhesive side of the first single-sided adhesive film; lapping a second side of the row bar while the row bar is secured to the first lapping ring at the first side of the row bar; transferring the row bar, with the first single-sided adhesive film attached, to a second lapping ring by applying a second single-sided adhesive film to the second side of the row bar and by applying a second vacuum to a non-adhesive side of the second single-sided adhesive film; removing the first single-sided adhesive film from the first side of the row bar while the row bar is secured to the second lapping ring at the second side of the row bar; lapping the first side of the row bar while the row bar is secured to the second lapping ring at the second side of the row bar; and dismounting the row bar from the second lapping ring.