Neutral layer polymer composition for directed self assembly and processes thereof

摘要

The present invention relates to a novel polymeric composition comprising a novel polymer having two or more repeat units and a terminus having the structure (1):;
wherein R1 represents a C1-C20 substituted or unsubstituted alkyl group, w is a number from 1-8, X is oxygen (O) or nitrogen (N), and Rd is a reactive group. The invention also relates to a process for forming a pattern using the novel polymeric composition. The invention further relates to a process of making the novel polymer.

主权项

1. A polymeric composition comprising a polymer comprising a) two or more repeat units and b) a terminus having the structure (1)wherein R1 represents a C1-C20 substituted or unsubstituted alkyl group, w is a number from 1-8, X is O or N and Rd is at least one group chosen from i) to viii);i)where Q1 represents a substituted or unsubstituted alkylene group having 1 to 20 carbon atoms, a substituted or unsubstituted alkenylene group, having 2 to 20 carbon atoms, a substituted or unsubstituted arylene group having 6 to 20 carbon atoms or a substituted or unsubstituted heteroarylene group having 5 to 20 carbon atoms; y = 1-5;ii)where Q2 represents a substituted or unsubstituted alkylene group having 1 to 20 carbon atoms, a substituted or unsubstituted alkenylene group, having 2 to 20 carbon atoms, a substituted or unsubstituted arylene group having 6 to 20 carbon atoms or a substituted or unsubstituted heteroarylene group having 5 to 20 carbon atoms, R3 represents hydrogen, an alkyl or substituted alkyl group having 1-20 carbon atoms, and R4, and R5 represent, independently, hydrogen or an alkyl or substituted alkyl group having 1-20 carbon atoms, or a hydroxy, alkoxy or substituted alkoxy group having 1-20 carbon atoms;iii)where Q1 represents a substituted or unsubstituted alkylene group having 1 to 20 carbon atoms, a substituted or unsubstituted alkenylene group, having 2 to 20 carbon atoms, a substituted or unsubstituted arylene group having 6 to 20 carbon atoms or a substituted or unsubstituted heteroarylene group having 5 to 20 carbon atoms; y = 1-5;iv)—Ar—CH2OHwhere Ar represents a substituted or unsubstituted arylene group having 6 to 20 atoms or a substituted or unsubstituted heteroarylene group having 5 to 20 carbon atoms;v)where Q3 represents a substituted or unsubstituted alkylene group having 1 to 20 carbon atoms, a substituted or unsubstituted alkenylene group, having 2 to 20 carbon atoms, a substituted or unsubstituted arylene group having 6 to 20 carbon atoms or a substituted or unsubstituted heteroarylene group having 5 to 20 carbon atoms;vi)where U represents a substituted or unsubstituted alkylene group having 1 to 20 carbon atoms; and z is 1-2;vii)where Ar represents a substituted or unsubstituted arylene group having 6 to 20 carbon atoms or a substituted or unsubstituted heteroarylene group having 5 to 20 carbon atoms.viii)(RO)2OP—(CH2)w—where R represents a substituted or unsubstituted alkylene group having 1 to 20 carbon atoms, a substituted or unsubstituted alkenylene group, having 2 to 20 carbon atoms, a substituted or unsubstituted arylene group having 6 to 20 carbon atoms or a substituted or unsubstituted heteroarylene group having 5 to 20 carbon atoms, and w is a number from 1-10.