Front opening unified pod with latch structure

摘要

A Front Opening Unified Pod (FOUP) has a pair of latch structures, and the latch structures install in a door of the FOUP. The latch structures use a circular rotary turntable to drive a pair of sliding devices, let the latch structures can lock or unlock more stabilized, and use sliding rollers respectively disposed on the sliding devices to prevent the generation of dusts.

主权项

1. A front opening unified pod (FOUP), comprising:
a container body, having an opening for importing and exporting a plurality of wafers, two opposite edges at said opening of said container body respectively disposed with at least a pair of sockets; a door, joined with said opening of said container body for protecting said plurality of wafers inside said container body, and two opposite edges of said door respectively disposed with at least a pair of latch holes corresponding to said pair of sockets; a pair of latch structures, disposed in said door, each of said pair of said latch structures comprising: a circular rotary, having a first surface and a second surface, said first surface disposed with a rotating portion and said second surface disposed with a braking portion in a central area of said second surface; at least a pair of driving pieces formed on two opposite ends on periphery of said circular rotary; and a pair of sliding devices respectively disposed on two opposite sides of periphery of said circular rotary, each of said pair of sliding devices having a first end close to said circular rotary and a second end opposite to said first end, said first end formed with a hook-shaped engaging portion and a sliding portion and said second end formed with at least a latch bolt that corresponds to said latch holes of said door, wherein, said hook-shaped engaging portions hook said driving pieces for said sliding devices to be engaged with said circular rotary, and rotation of said circular rotary is controlled by said braking portion, and said latch bolts of said sliding devices are thus driven to and fro between said pair of sockets and said pair of latch holes.