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发明名称
用于静电夹盘之修理与翻新的方法及装置;METHODS AND APPARATUS FOR ELECTROSTATIC CHUCK REPAIR AND REFURBISHMENT
摘要
在本发明的一个实施例中,一种基板支撑组件包含具有内嵌的电极并具有贯穿设置的孔的静电夹盘,位于该静电夹盘之表面上及该孔内的导电衬垫,从该静电夹盘之下表面延伸并与该孔轴向对齐的导电管道,以及至少部分位于该孔内并至少部分位于该导电管道内的导电涂层,其中该导电涂层在该导电衬垫和该导电管道之间提供导电路径。
申请公布号
TW201436092
申请公布日期
2014.09.16
申请号
TW103103925
申请日期
2014.02.06
申请人
应用材料股份有限公司
发明人
瑞吉高芬达;希拉哈拉罗伯T
分类号
H01L21/683(2006.01)
主分类号
H01L21/683(2006.01)
代理机构
代理人
<name>蔡坤财</name><name>李世章</name>
主权项
地址
APPLIED MATERIALS, INC. 美国
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