Switch probe and device and system for substrate inspection

摘要

A switch probe for use in a substrate inspection device to inspect a substrate includes a first tubular element, a first rod element partially accommodated in the first tubular element, and pressed into the first tubular element when the certain part is mounted for substrate inspection, a second tubular element fixed in the first tubular element, a second rod element partially accommodated in the second tubular element which is inside the first tubular element, and contacting with the first rod element when the first rod element is pressed into the first tubular element, and a fixing mechanism configured to temporarily fix the second rod element in a position so that the second rod element does not contact with the first rod element even when the first rod element is pressed into the first tubular element.

主权项

1. A switch probe for use in a substrate inspection device to inspect a substrate to determine whether or not a part to be inspected is mounted on the substrate in a predetermined position, the switch probe comprising:
a first tubular element; a first rod element partially accommodated in the first tubular element, and pressed into the first tubular element when the part to be inspected is mounted for substrate inspection; a second tubular element fixed in the first tubular element; a second rod element partially accommodated in the second tubular element which is inside the first tubular element, and contacting with the first rod element when the first rod element is pressed into the first tubular element; and a fixing mechanism configured to temporarily fix the second rod element in a position so that the second rod element does not contact with the first rod element even when the first rod element is pressed into the first tubular element, the fixing mechanism comprising:
a screw hole formed in the vicinity of one end of the second rod element, extending to the first rod element;a first screw to screw into the screw hole when the second rod element is temporarily fixed; anda screw retainer configured to retain the screw when the second rod element is positioned for the temporary fixing.