| 发明名称 | Vertical probe assembly with air channel | ||
| 摘要 | A vertical probe assembly includes an upper die; a lower die; a plurality of probes, the probes including an electrically conductive material, wherein the probes extend from the upper die through the lower die; and an air channel located between the upper die and the lower die, such that airflow through the air channel passes through the plurality of probes. | ||
| 申请公布号 | US8836356(B2) | 申请公布日期 | 2014.09.16 |
| 申请号 | US201113323001 | 申请日期 | 2011.12.12 |
| 申请人 | International Business Machines Corporation | 发明人 | Audette David M.;Fregeau Dustin M.;Gardell David L.;Murphy Daniel J.;Wagner Grant |
| 分类号 | G01R31/10 | 主分类号 | G01R31/10 |
| 代理机构 | Cantor Colburn LLP | 代理人 | Cantor Colburn LLP ;LeStrange Michael |
| 主权项 | 1. A vertical probe assembly, comprising: an upper die; a lower die; a plurality of probes, the probes comprising an electrically conductive material, wherein the probes extend from a lower surface of a space transformer that is located directly on top of a top surface of the upper die through the upper die, and through the lower die, wherein the probes do not extend through the space transformer; and an air channel located between the upper die and the lower die, such that airflow through the air channel passes through the plurality of probes, wherein the air channel extends through the upper die, and comprises an air inlet comprising a hole located in the top surface of the upper die, and an air outlet comprising a hole located in the top surface of the upper die. | ||
| 地址 | Armonk NY US | ||