发明名称 Semiconductor device and method for manufacturing the same
摘要 A semiconductor device according to an embodiment of the present invention includes fuse patterns spaced apart from each other by a predetermined distance over a first interlayer insulation film; a second interlayer insulation film disposed between the fuse patterns over the first interlayer insulation film; and a capping film pattern formed over the fuse patterns and the second interlayer insulation films, the capping film pattern including a slot exposing the second interlayer insulation film.
申请公布号 US8836077(B2) 申请公布日期 2014.09.16
申请号 US201213719064 申请日期 2012.12.18
申请人 SK Hynix Inc. 发明人 Kim Jeong Youl;Choi Ki Soo
分类号 H01L23/52;H01L23/525 主分类号 H01L23/52
代理机构 代理人
主权项 1. A semiconductor device comprising: first and second fuse patterns spaced apart from each other by a predetermined distance over a first interlayer insulation film, wherein middle portions of the first and second fuse patterns are blowing regions; a second interlayer insulation film disposed between the first and second fuse patterns; and a capping film pattern disposed over the first and second fuse patterns and the second interlayer insulation film including a slot exposing a portion of the second interlayer insulation film; wherein a long-axis length of the slot is longer than a long-axis length of the blowing regions of the fuse patterns and is shorter than a long-axis length of the first and second fuse patterns.
地址 Icheon KR