Device for treating disc-like articles

摘要

A device for treating a disc-like article with a fluid, including elements for dispensing a fluid onto the article and a chuck for holding and rotating the article around an axis perpendicular thereto, the chuck including a base body, a drive ring, and gripping members for contacting the article at its edge. The gripping members are eccentrically movable with respect to the center of the article and driven by a drive ring rotatably mounted to the base body so that the drive ring is rotatable against the base body around the axis. The relative rotational movement of the drive ring against the base body is carried out by either holding the base body and rotating the drive ring or by holding the drive ring and rotating the base body, whereby the to-be-held-part (drive ring or base body) is held without touching the respective to-be-held-part by magnetic force.

主权项

1. A device for treating a disc-like article with a fluid, the device comprising:
at least one dispenser for dispensing a fluid onto a disc-like article and a chuck for holding and rotating a disc-like article about an axis A perpendicular to the disc-like article, the chuck comprising a base body and gripping members for contacting the disc-like article at its edge, wherein the gripping members are radially movable with respect to the axis A, wherein the gripping members extend downwardly from an obliquely-inclined radially-inwardly facing annular surface of the base body, and wherein said obliquely-inclined surface surrounds the gripping members and extends downwardly to a level lower than a disc-like article when held by the gripping members.