发明名称 |
Method for producing a two-chip assembly and corresponding two-chip assembly |
摘要 |
A method for producing a two-chip assembly includes: providing a wafer having a first thickness, which wafer has a front side and a back side, a first plurality of first chips being provided on the front side of the wafer; attaching a second plurality of second chips on the front side of the wafer, so that every first chip is joined in each instance to a second chip and forms a corresponding two-chip pair; forming a cohesive mold package on the front side of the wafer, so that the second chips are packaged; thinning the wafer from the back side to a second thickness which is less than the first thickness; forming vias from the back side to the second chips; and separating the two-chip pairs into corresponding two-chip assemblies. |
申请公布号 |
US8835222(B2) |
申请公布日期 |
2014.09.16 |
申请号 |
US201213623244 |
申请日期 |
2012.09.20 |
申请人 |
Robert Bosch GmbH |
发明人 |
Bruendel Mathias;Haag Frieder;Frey Jens;Speicher Rolf;Fritz Juergen;Rauscher Lutz |
分类号 |
H01L21/00;B81C1/00;H01L21/56;H01L21/50;H01L23/48;H01L23/00;H01L23/544;H01L21/768 |
主分类号 |
H01L21/00 |
代理机构 |
Kenyon & Kenyon LLP |
代理人 |
Kenyon & Kenyon LLP |
主权项 |
1. A method for producing a two-chip assembly, comprising:
providing a wafer having a first thickness, a front side, and a back side, a first plurality of first chips being provided as part of the wafer; mounting a second plurality of second chips on the front side of the wafer so that every first chip is joined in each instance to a corresponding second chip and forms a corresponding two-chip pair; forming a cohesive one-sided mold package on the front side of the wafer so that the second chips are packaged; thinning the wafer from the back side to a second thickness which is less than the first thickness; forming multiple vias and electrical connections from the back side to the second chips; and separating the two-chip pairs into corresponding two-chip assemblies. |
地址 |
Stuttgart DE |