Inspecting device for detecting appearance of debris on a surface of a glass substrate, inspecting apparatus and method for conducting inspection

摘要

The present invention discloses an inspecting device for detecting whether there is an appearance of debris on a surface of a glass substrate, including a laser unit, a platform, and an image sensor unit. The surface of the platform is coated with a light-absorbing material so as to absorb laser beams penetrating through the glass substrate to prevent the image sensor unit from receiving the reflected laser beam from the underside of the glass substrate. Besides, the present invention discloses an inspecting apparatus for detecting whether there is an appearance of debris on a surface of a glass substrate, using the inspecting device given above, and a method for conducting inspection. The inspecting device features a simplified configuration; the method is easy to operate; and the device can effectively prevent the background interference from the underside of glass substrates when determining whether there is an appearance of debris on top surfaces of glass substrates. The device prevents mistakes in detecting glass substrates; and the device improves the accuracy rate of inspection.

主权项

1. A method for conducting inspection on a surface of a glass substrate, including the steps of:
providing a platform having a working surface coated with a light-absorbing material; disposing a laser unit arranged above the working surface and capable of projecting an inclined laser beam to scan the upper surface of the platform; disposing an image sensor located above the working surface of the platform and distant to the laser unit, and capable of collecting an image thereunder; disposing a glass substrate having top and bottom surfaces onto the working surface of the platform and with the bottom surface in close contact with the working surface of the platform; projecting an inclined laser beam toward the top surface of the glass substrate wherein part of the inclined laser beam penetrated through a thickness of the glass substrate and emits the bottom surface of the glass substrate is absorbed by the light-absorbing material of the working surface of the platform to refrain a refraction therefrom so as to eliminate an reflected image of the bottom surface of the glass substrate, while part of the inclined laser beam is reflected by the top surface of the glass substrate; collecting image of the top surface illuminated by the inclined laser beam by the image sensor to determine whether there is an foreign object appeared on the top surface of the glass substrate; and advancing the platform to complete the scan of the top surface of the glass substrate.