Elevator linear motor drive

摘要

Disclosed is a substrate processing system with a magnetic conduit configuration to improve the movement of a substrate carrier within the system. The configuration specifically provides for safe, secure movement of a carrier between multiple levels of a substrate processing system by using magnetic conduits to redirect magnetic forces created by a linear motor, permitting the linear motor to be positioned outside of the system and in a location that will not interfere with the movement of the carrier.

主权项

1. An elevator subsystem in a substrate processing system, comprising:
an elevator chamber capable of sustaining a vacuum; at least one linear motor positioned outside the elevator chamber, wherein the linear motor generates a magnetic motive force; a movable carrier comprising a plurality of magnetic elements; a vertically-movable elevator base for moving the carrier vertically; and, a plurality of pole pieces attached to the elevator base and coupling the magnetic field from the linear motor to the magnetic elements; wherein the plurality of pole pieces are positioned below the underside of the carrier so as to enhance the stability of the carrier by enhancing the gravitational forces on the carrier.