METHOD OF MANUFACTURING VANADIUN DIOXIDE FILM AND BOLOMETER, AND BOLOMETER AND IR DETECTOR MANUFACTURED BY THE SAME

摘要

The present invention relates to a method for manufacturing a vanadium oxide film for a bolometer, a method for manufacturing a bolometer, and a bolometer and an infrared detector manufactured thereby. The method for manufacturing a vanadium oxide film for a bolometer according to the present invention comprises the steps of: forming a vanadium pentoxide sol having tungsten added thereto; forming a vanadium pentoxide film having tungsten added thereto on a substrate using the sol; and heat-treating the vanadium pentoxide film having tungsten added thereto under a reducing atmosphere. By using a vanadium oxide film for a bolometer manufactured according to the manufacturing method, a bolometer having excellent infrared detection sensitivity in an operation temperature range and improved temperature stability together with low resistivity, a high TCR value and low noise characteristics; and an infrared detector including the same can be manufactured.