APPARATUS FOR MANUFACTURING OF BASED THIN FILM SOLARCELL

摘要

The present invention relates to an apparatus for manufacturing a CIGS thin film for a solar cell, which manufactures a thin film while a thermocouple is in contact with a substrate to accurately measure the temperature of the substrate. The present invention relates to an apparatus allowing an organic substance evaporated from a spot evaporation source in a vacuum evaporation apparatus to be deposited on the substrate, which allows multiple spot evaporation sources to be circularly arranged on the lower side of the substrate, while being separated from the center in the same distance, controls the evaporation direction of the organic substance to evaporate the organic substance toward the organic substance from the spot evaporation source, and controls the temperature of the substrate by allowing multiple thermocouples to be contacted to the substrate while the substrate is fixed.