Microscopy of several samples using optical microscopy and particle beam microscopy

摘要

A method for the microscopy of samples using optical microscopy and particle beam microscopy provides that the samples are divided into a partial quantity and a residual quantity and the samples of the partial quantity are prepared to contain registration marks. The samples of the partial quantity are imaged using optical microscopy and particle beam microscopy, with the result that a pair of optical microscopy images and particle beam microscopy images is obtained for each sample of the partial quantity. The pairs are position-registered relative to each other using the registration marks. The images of the position-registered pairs are modified by removing the registration marks. A registration algorithm is trained which evaluates the image contents and issues a quality measure for a position registration of each pair. The objects of the residual quantity are imaged. These pairs are position-registered by the trained registration algorithm to maximize the quality measure.

主权项

1. A method for microscopy of several samples using optical microscopy and particle beam microscopy, comprising:
a) dividing the samples into a partial quantity and a residual quantity, b) preparing the samples of the partial quantity such that they contain registration marks which are visible in both optical microscopy and particle beam microscopy, c) imaging the samples of the partial quantity using optical microscopy and particle beam microscopy, with the result that a pair consisting of optical microscopy image and particle beam microscopy image is obtained for each sample of the partial quantity, d) positioning registering pairs consisting of an optical microscopy image and a particle beam microscopy image relative to each other using the registration marks, e) modifying the optical microscopy images and the particle beam microscopy images of the position-registered pairs by removing the registration marks from the images, f) training a registration algorithm which evaluates image contents and issues a quality measure for a position registration of each of the pairs using the modified optical microscopy images and the modified particle beam microscopy images of the position-registered pairs, and g) imaging the samples of the residual quantity having no registration marks using optical microscopy and particle beam microscopy, with the result that a pair including an optical microscopy image and a particle beam microscopy image is also obtained for each sample of the residual quantity, and position-registering these pairs relative to each other with the help of the trained registration algorithm by moving the images of each pair opposite one another to maximize the quality measure issued by the trained registration algorithm for the respective pair.