Method for manufacturing semiconductor substrate

摘要

A semiconductor substrate is provided in which an alignment mark is formed that can be used for an alignment even after the formation of an impurity diffused layer by the planarization of an epitaxial film. A trench is formed in an alignment region of an N+-type substrate. This trench is used to leave voids after the formation of an N−-type layer. Then, the voids formed in the N+-type substrate can be used as an alignment mark. Thus, such a semiconductor substrate can be used to provide an alignment in the subsequent step of manufacturing the semiconductor apparatus. Thus, the respective components constituting the semiconductor apparatus can be formed at desired positions accurately.

主权项

1. A method for manufacturing a semiconductor substrate comprising:
preparing a substrate made of single crystal semiconductor; arranging, on the substrate, a mask material in which an opening is formed in an alignment region in the substrate different from a device formation region; etching the substrate covered by the mask material to form an alignment mark formation trench in the alignment region; and forming a semiconductor layer made of single crystal on the surface of the substrate so as to form voids in the alignment mark formation trench.