发明名称 Linearized control of piezoelectric actuator to reduce hysteresis
摘要 An exemplary piezoelectric actuator includes a piezoelectric transducer that exhibits displacements when energized with corresponding voltages. A control system is electrically connected to the piezoelectric transducer so as to provide the transducer with the voltages. The control system includes feedback of displacements of the transducer as functions of respective voltage commands and feed-forward of electrical currents passing through the transducer as functions of the respective voltages applied to the transducer. The control system further has a feedback controller connected to receive transducer-displacement data corresponding to the voltages applied to the transducer. The control system further can include a current-feed-forward amplifier connected to receive transducer-current data corresponding to the voltages applied to the transducer. Such a control system facilitates reduction of hysteresis in controlled actuation of the actuator.
申请公布号 US8836252(B2) 申请公布日期 2014.09.16
申请号 US201213656909 申请日期 2012.10.22
申请人 Nikon Corporation 发明人 Hsin Yi-Ping;Isago Susumu;Yuan Bausan
分类号 H01L41/09 主分类号 H01L41/09
代理机构 Klarquist Sparkman, LLP 代理人 Klarquist Sparkman, LLP
主权项 1. An actuator, comprising: a piezoelectric transducer that exhibits displacements when energized with corresponding voltages; and a control system electrically connected to the piezoelectric transducer so as to provide the transducer with the voltages, the control system including feedback of displacements of the transducer as functions of respective voltage commands and feed-forward of electrical currents passing through the transducer as functions of the respective voltages applied to the transducer.
地址 Tokyo JP