SOLAR CELL WITH QUANTUM RING STRUCTURE AND MANUFACTURING METHOD THEREOF

摘要

According to an aspect of the present invention, provided is a method to manufacture a solar cell with a quantum ring structure comprising: (a) a GaAs substrate layer forming step of doping the GaAs substrate layer with high concentration; (b) a buffer layer forming step of growing a non-doped GaAs layer on the GaAs substrate doped with high concentration; (c) a first barrier layer forming step of forming a first barrier layer of Al_0.33Ga_0.67As on the buffer layer; (e) a quantum ring forming step of irradiating the barrier layer with Ga liquid droplets and As4 flux and crystallizing the GaAs quantum ring under an atmosphere at 400°C; (d) a cap layer forming step of depositing an Al_0.33Ga_0.67As layer of a thin film with 10 nm on the quantum ring under an atmosphere at 400°C after forming the quantum ring; (f) a second barrier layer forming step of depositing an Al_0.33Ga_0.67As layer with 20 nm on the cap layer under an atmosphere at 600°C; and (g) a plurality of quantum ring structure layer forming step of forming a plurality of quantum ring structure by repeating steps (d)-(f) 4-6 times.