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发明名称
具有受控制的封闭间隙之基板支撑件;SUBSTRATE SUPPORT WITH CONTROLLED SEALING GAP
摘要
此处提供一种基板支撑件的实施例。在某些实施例中,基板支撑件可包括支撑板,该支撑板具有支撑表面以支撑基板;支撑环,该支撑环于支撑表面的周围处支撑基板;及复数个第一支撑元件,该复数个第一支撑元件布置于支撑环中,其中各个第一支撑元件的端部分系抬昇高于支撑环的上部表面,以在支撑环的上部表面及布置于复数个第一支撑元件的端部分上的虚构平面之间界定一间隙。
申请公布号
TW201436090
申请公布日期
2014.09.16
申请号
TW103101649
申请日期
2014.01.16
申请人
应用材料股份有限公司
发明人
古法西欧肯;休斯顿约耳M;祖国权
分类号
H01L21/683(2006.01)
主分类号
H01L21/683(2006.01)
代理机构
代理人
<name>蔡坤财</name><name>李世章</name>
主权项
地址
APPLIED MATERIALS, INC. 美国
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