Method of treating a gas stream

摘要

A method is described for treating a gas stream comprising fluorine (F2) gas. In a preferred embodiment, the method comprises adding water vapor to a gas stream and conveying the gas stream and water vapor to a reaction chamber containing a heated bed of material to react with F2 to form an inorganic fluoride while inhibiting formation of CF4 within the reaction chamber, and at least partially evacuating the reaction chamber so that the gas stream is conveyed to and from the reaction chamber at sub-atmospheric pressure.

主权项

1. A method of treating a gas stream comprising fluorine (F2) gas, the method comprising the steps of:
adding water vapor to the gas stream prior to a reaction chamber; conveying the gas stream with the water vapor to the reaction chamber containing a heated bed of material for reacting with F2 to form a solid inorganic fluoride wherein the bed of material contains at least one of carbonate or a material having carbon impurities and the water vapor inhibits formation of CF4 within the reaction chamber; and at least partially evacuating the reaction chamber so that the gas stream is conveyed to and from the reaction chamber at a sub-atmospheric pressure.