Transport apparatus having a measuring system and methods therefor

摘要

A transport apparatus includes a bearing assembly for transporting an article. The bearing assembly includes a support structure for receiving the article, and a plenum housing for receiving the support structure. The plenum housing and the support structure define a plenum cavity, the plenum cavity being configured to receive and direct a flowing gas for floatingly supporting the article above the support structure. The bearing assembly further includes at least one sensor assembly, which includes a sensor for transmitting and receiving energy emissions for determining a location of the article relative to the support structure. The sensor assembly may determine the location of the article relative to the support structure substantially through at least one aperture located on the bearing assembly. The article location determined by the sensor assembly may be communicated to a display panel or a control unit for adjusting the location if necessary.

主权项

1. A transport apparatus for transporting an article, comprising:
at least one support structure, the support structure comprising a first side and a second side, and a surface disposed between the first and second sides, the surface being configured to floatingly support an article on a gas layer, the support structure having at least one sensor aperture disposed through the surface; at least one plenum housing, the plenum housing receiving the at least one support structure to define at least one plenum cavity, the plenum cavity configured to receive and direct a flowing gas through at least one gas aperture to the gas layer; at least one sensor assembly in the at least one cavity and associated with the support structure, the sensor assembly comprising a field effect sensor configured to transmit and receive energy emissions at least through the at least one sensor aperture to determine a location of the article relative to the support structure surface, wherein the location of the article relative to the support structure surface comprises a height above the support structure surface; at least one control unit, the control unit configured to communicate with the at least one sensor assembly; and at least one gas flow source, the gas flow source configured to communicate with the at least one control unit, the gas flow source configured to flow gas to the plenum cavity, the control unit configured to adjust gas flow from the gas flow source in response to communication from the sensor assembly to adjust the location of the article above the surface of the support structure.