发明名称 |
LARGE SCALED IMPRINT APPARATUS AND METHOD |
摘要 |
<p>Disclosed are a large scaled imprint apparatus and a method thereof. A large scaled imprint apparatus according to an embodiment of the present invention includes a roll-to-roll unit for winding or rewinding a flexible substrate; a stage which is adjacent to a winding path of the flexible substrate, touches the flexible substrate having a stamping pattern or a stamp master having a master pattern for forming the stamping pattern in the flexible substrate, and supports a substrate which has the surface with a pattern; and a stamping pressure unit which is adjacent to the stage and presses the flexible substrate to allow the flexible substrate to touch the stamp master or the substrate.</p> |
申请公布号 |
KR20140109624(A) |
申请公布日期 |
2014.09.16 |
申请号 |
KR20130023802 |
申请日期 |
2013.03.06 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
HWANG, EUN SOO;CHOI, EUI SUN;LEE, SUNG HOON |
分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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