发明名称 LARGE SCALED IMPRINT APPARATUS AND METHOD
摘要 <p>Disclosed are a large scaled imprint apparatus and a method thereof. A large scaled imprint apparatus according to an embodiment of the present invention includes a roll-to-roll unit for winding or rewinding a flexible substrate; a stage which is adjacent to a winding path of the flexible substrate, touches the flexible substrate having a stamping pattern or a stamp master having a master pattern for forming the stamping pattern in the flexible substrate, and supports a substrate which has the surface with a pattern; and a stamping pressure unit which is adjacent to the stage and presses the flexible substrate to allow the flexible substrate to touch the stamp master or the substrate.</p>
申请公布号 KR20140109624(A) 申请公布日期 2014.09.16
申请号 KR20130023802 申请日期 2013.03.06
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 HWANG, EUN SOO;CHOI, EUI SUN;LEE, SUNG HOON
分类号 H01L21/027 主分类号 H01L21/027
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