| 摘要 |
The present invention relates to an airtightness inspection apparatus capable of detecting both a large-capacity leak and a small-capacity leak of a sealed product. According to the present invention, a pressure displacement of an inspection chamber is detected in a state of charge chamber-inspection chamber pressure balance to detect a large-capacity leak of an inspection object and a flow rate of compressed moving to the inspection chamber is detected in a state of inspection chamber-reservoir chamber pressure balance to detect a small-capacity leak. Accordingly, airtightness can be detected with accuracy and speed during an airtightness inspection of a completely sealed product regardless of the type of defect of the inspection object. |
