SCANNING ELECTRONIC MICROSCOPE

摘要

Disclosed is a scanning electronic microscope which collects charges accumulated on a sample surface. The scanning electronic microscope includes: a column part which generates an electron beam and emits it to a sample; a chamber part which includes a sample stage which is combined to the column part, is arranged to be separated from the end of the column part, and receives the sample; a detection part which detects signals emitted from the sample; a charge collection part which is arranged between the sample stage and the end of the column part, and collects charges; and a power applying part which applies an optimal voltage by the sample to the charge collection part.