| 摘要 |
<p>An objective of the present invention is to stably generate plasma. A microwave waveguide apparatus (2) for generating plasma includes a waveguide (21) which has a first end (21a) and a second end (21b) and propagates microwave from input end (2A) such that the microwave propagates from the first end (21a) to the second end (21b); a circulator device having a first port (22a), a second port (22b) coupled to the first end (22a), and a third port (22c) coupled to the second end (21b), wherein the circulator device is structured such that the microwave is received at the first port (22a), propagates from the second port (22b) to the first end (2A), is received at the third port (22c) from the second end (22b) and is returned toward the input end (2A); and a matching device which is interposed between the input end and the circulator device and including an EH tuber to reflect part of the microwave received at the third port (22c) of the circulator device and returned toward the input end (2A) to the first port. The waveguide has a slot-hole extending along the microwave propagation direction in the waveguide.</p> |
