| 发明名称 |
PUPIL PLANE CALIBRATION FOR SCATTEROMETRY OVERLAY MEASUREMENT |
| 摘要 |
<p>Methods and calibrations modules are provided, for calibrating a pupil center in scatterometry overlay measurements. The calibration comprises calculating fluctuations from an average of an overlay signal per pixel at the pupil and minimizing the fluctuations with respect to a pupil weighted variance thereof.</p> |
| 申请公布号 |
WO2014138522(A1) |
申请公布日期 |
2014.09.12 |
| 申请号 |
WO2014US21529 |
申请日期 |
2014.03.07 |
| 申请人 |
KLA-TENCOR CORPORATION |
发明人 |
BRINGOLTZ, BARAK;VAKSHTEIN, IRINA;AHARON, OFIR;BEN DOV, GUY;BOMZON, ZEEV |
| 分类号 |
G01N21/47 |
主分类号 |
G01N21/47 |
| 代理机构 |
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