| 摘要 |
This limiting current gas sensor is provided with: an Si substrate (1); a microheater (2) formed on the Si substrate (1); a solid electrolyte layer (4) having ion conductivity formed on the Si substrate (1); a positive-negative pair of porous electrodes (5a, 5b) formed adhered to the solid electrolyte layer (4); and a detection circuit (8) for detecting a predetermined gas concentration in a gas to be measured by means of a limiting current method by means of imposing a voltage between the positive-negative pair of porous electrodes (5a, 5b). Provided are: the limiting current gas sensor, which is able to reduce power consumption; a method for producing the limiting current gas sensor; and a sensor network system. |
