发明名称 CRYSTALLIZATION AND BLEACHING OF DIAMOND-LIKE CARBON AND SILICON OXYNITRIDE THIN FILMS.
摘要 Optically transparent diamond-like carbon (DLC) thin films are formed using relatively low-temperature deposition conditions followed by a post-deposition bleaching step. The bleaching can include exposure of an as-deposited thin film to UV laser radiation, which reduces the concentration of defects in the film. The method is compatible with temperature-sensitive substrates, and can be used to form water clear DLC layers on glass substrates, for example, which can be used in display applications.
申请公布号 WO2014137887(A2) 申请公布日期 2014.09.12
申请号 WO2014US19852 申请日期 2014.03.03
申请人 CORNING INCORPORATED;PAULSON, CHARLES, ANDREW 发明人 PAULSON, CHARLES, ANDREW
分类号 C23C14/58 主分类号 C23C14/58
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