| 摘要 |
A heat treatment method and a heat treatment device which heats an object to be processed with optical irradiation without the damage to a resin included in the object to be processed. An optical filter (60) which cuts ultraviolet light under 400 nm wavelength is arranged between a flash lamp (FL) and a retention plate (20) within a chamber (10). The ultraviolet light under the 400 nm wavelength is cut when flash light emitted from the flash lamp (FL) penetrates the optical filter (60). An object (8) to be processed of a processing target is formed by arranging a function layer on the top of a material of a resin. The heat treatment device does not give the damage due to the ultraviolet light and thermal damage to the material of the resin by irradiating the object (8) to be processed with light in which the ultraviolet light under the 400 nm wavelength is cut from the flash light having a short time. Therefore, the heat treatment device performs a desired heat treatment by heating the function layer to the necessary processing temperature. [Reference numerals] (41) Processing gas; (51) Exhaust; (9) Control unit |
