REFLECTOR AND CVD REACTOR FOR MANUFACTURING POLYSILLICON BY USING THE SAME

摘要

PURPOSE: A reflector and a CVD(Chemical Vapor Deposition) reactor for manufacturing polysilicon using the same are provided to reduce an energy consumption amount and production costs by improving the thermal decomposition reaction efficiency of trichloroethylene. CONSTITUTION: A reflector(2) is installed inside a CVD(Chemical Vapor Deposition) reactor(1). The reflector forms a predetermined internal space accepting a slim load(3). A reflective material is formed in an inner wall of the reflector. The reflective material efficiently blocks radiant energy coming out from a heated slim load. The radiant energy reflected through the reflector is reused for the silicon deposition reaction.