发明名称 SEMICONDUCTOR DEVICE
摘要 The problem addressed by the present invention is to provide a high-breakdown-voltage semiconductor device of high reliability. As means for solving the problem: in a case of being a Schottky diode, concentration of impurities in a first JTE region is set to be greater than or equal to 4.4 × 1017 cm-3 and less than or equal to 6 × 1017 cm-3, and concentration of impurities in a second JTE region is set to be less than or equal to 2 × 1017 cm-3; and in a case of being a junction barrier Schottky diode, concentration of impurities in the first JTE region is set to be greater than or equal to 6 × 1017 cm-3 and less than or equal to 8 × 1017 cm-3, and concentration of impurities in the second JTE region is set to be less than or equal to 2 × 1017 cm-3.
申请公布号 WO2014136344(A1) 申请公布日期 2014.09.12
申请号 WO2013JP83101 申请日期 2013.12.10
申请人 HITACHI POWER SEMICONDUCTOR DEVICE, LTD. 发明人 MOCHIZUKI, KAZUHIRO;ONOSE, HIDEKATSU;KAMESHIRO, NORIFUMI;YOKOYAMA, NATSUKI
分类号 H01L29/47;H01L29/06;H01L29/872 主分类号 H01L29/47
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